The microstructure and mechanical properties of He charged Al films fabricated by HiPIMS/DCMS co-sputtering
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Title
The microstructure and mechanical properties of He charged Al films fabricated by HiPIMS/DCMS co-sputtering
Authors
Keywords
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Journal
Vacuum
Volume -, Issue -, Pages 112744
Publisher
Elsevier BV
Online
2023-11-03
DOI
10.1016/j.vacuum.2023.112744
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