The microstructure and mechanical properties of He charged Al films fabricated by HiPIMS/DCMS co-sputtering
出版年份 2023 全文链接
标题
The microstructure and mechanical properties of He charged Al films fabricated by HiPIMS/DCMS co-sputtering
作者
关键词
-
出版物
Vacuum
Volume -, Issue -, Pages 112744
出版商
Elsevier BV
发表日期
2023-11-03
DOI
10.1016/j.vacuum.2023.112744
参考文献
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