Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

Published 2019 View Full Article

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Title
Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 816, Issue -, Pages 152587
Publisher
Elsevier BV
Online
2019-10-07
DOI
10.1016/j.jallcom.2019.152587

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