Enhanced properties of tungsten films by high-power impulse magnetron sputtering

Published 2019 View Full Article

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Title
Enhanced properties of tungsten films by high-power impulse magnetron sputtering
Authors
Keywords
High power impulse magnetron sputtering, In-situ stress measurements, Tungsten films, Hardness, Adhesion
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 363, Issue -, Pages 191-197
Publisher
Elsevier BV
Online
2019-02-19
DOI
10.1016/j.surfcoat.2019.02.055

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