Structure, phase evolution, and properties of Ta films deposited using hybrid high-power pulsed and dc magnetron co-sputtering

Published 2021 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Structure, phase evolution, and properties of Ta films deposited using hybrid high-power pulsed and dc magnetron co-sputtering
Authors
Keywords
-
Journal
Chinese Physics B
Volume -, Issue -, Pages -
Publisher
IOP Publishing
Online
2021-12-16
DOI
10.1088/1674-1056/ac43a9

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.