Microstructure and He desorption behaviors of He charged FeCrNi-based films fabricated by direct current magnetron sputtering

Published 2015 View Full Article

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Title
Microstructure and He desorption behaviors of He charged FeCrNi-based films fabricated by direct current magnetron sputtering
Authors
Keywords
Magnetron sputtering, Iron, Chromium, Helium, Thin films, Nanoindentation, Hardness, Thermal desorption spectroscopy
Journal
THIN SOLID FILMS
Volume 589, Issue -, Pages 627-632
Publisher
Elsevier BV
Online
2015-06-26
DOI
10.1016/j.tsf.2015.06.041

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