Influence of substrate bias voltage on microstructure and mechanical characteristics of TiAlSiN coating deposited by High Power Impulse Magnetron Sputtering (HiPIMS)
Published 2023 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Influence of substrate bias voltage on microstructure and mechanical characteristics of TiAlSiN coating deposited by High Power Impulse Magnetron Sputtering (HiPIMS)
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 458, Issue -, Pages 129351
Publisher
Elsevier BV
Online
2023-02-25
DOI
10.1016/j.surfcoat.2023.129351
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Influence of Si content on phase stability and mechanical properties of TiAlSiN films grown by AlSi-HiPIMS/Ti-DCMS co-sputtering
- (2021) Tun-Wei Hsu et al. SURFACE & COATINGS TECHNOLOGY
- Influence of pulse frequency on microstructure and mechanical properties of Al-Ti-V-Cu-N coatings deposited by HIPIMS
- (2020) Haijuan Mei et al. SURFACE & COATINGS TECHNOLOGY
- Microstructure, mechanical properties, and cutting performance of TiAlSiN multilayer coatings prepared by HiPIMS
- (2018) Guodong Li et al. SURFACE & COATINGS TECHNOLOGY
- Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique
- (2018) Ji Cheng Ding et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Influence of Si content on mechanical and tribological properties of TiAlSiN PVD coatings at elevated temperatures
- (2017) Wolfgang Tillmann et al. SURFACE & COATINGS TECHNOLOGY
- High temperature oxidation behavior and wear resistance of Ti0.53Al0.47N coating by cathodic arc evaporation
- (2017) Z.T. Wu et al. VACUUM
- Relationship of microstructure, mechanical properties and titanium cutting performance of TiAlN/TiAlSiN composite coated tool
- (2016) Xudong Sui et al. CERAMICS INTERNATIONAL
- Effect of Ti content on the microstructure and mechanical properties of TiAlSiN nanocomposite coatings
- (2016) Quansheng Ma et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- High temperature tribological properties of TiAlSiN coatings produced by hybrid PVD technology
- (2016) Nairu He et al. TRIBOLOGY INTERNATIONAL
- Influence of discharge power on the structural, electro-optical, and mechanical properties of (TiZrHf)N coatings
- (2015) Du-Cheng Tsai et al. JOURNAL OF ALLOYS AND COMPOUNDS
- Correlation between microstructure evolution and high temperature properties of TiAlSiN hard coatings with different Si and Al content
- (2014) Tian Chen et al. APPLIED SURFACE SCIENCE
- A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering
- (2014) G. Greczynski et al. SURFACE & COATINGS TECHNOLOGY
- Structure and properties of TiAlLaN films deposited at various bias voltages
- (2013) Hao Du et al. APPLIED SURFACE SCIENCE
- Microstructure and mechanical properties of nanostructured Ti–Al–Si–N coatings deposited by magnetron sputtering
- (2013) A. Miletić et al. SURFACE & COATINGS TECHNOLOGY
- Influence of pulsed substrate bias on the structure and properties of Ti–Al–N films deposited by cathodic vacuum arc
- (2012) G.P. Zhang et al. APPLIED SURFACE SCIENCE
- Relationship between tribological properties and oxidation behavior of Ti 0.34 Al 0.66 N coatings at elevated temperature up to 900 °C
- (2012) Z.B. Qi et al. SURFACE & COATINGS TECHNOLOGY
- TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage
- (2011) D.M. Devia et al. APPLIED SURFACE SCIENCE
- Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering
- (2011) Yanhong Lv et al. APPLIED SURFACE SCIENCE
- Endurance of TiAlSiN coatings: Effect of Si and bias on wear and adhesion
- (2011) D. Philippon et al. WEAR
- Effect of Si addition on microstructure and mechanical properties of Ti–Al–N coating
- (2010) She Q. Wang et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- The evolution of the plasma potential in a HiPIMS discharge and its relationship to deposition rate
- (2010) Anurag Mishra et al. PLASMA SOURCES SCIENCE & TECHNOLOGY
- Machining performance of Ti–Al–Si–N coated inserts
- (2010) Li Chen et al. SURFACE & COATINGS TECHNOLOGY
- High temperature tribological characterisation of TiAlSiN coatings produced by cathodic arc evaporation
- (2010) Gonzalo G. Fuentes et al. SURFACE & COATINGS TECHNOLOGY
- Improved oxidation resistance of TiAlN coatings by doping with Si or B
- (2009) M. Pfeiler et al. SURFACE & COATINGS TECHNOLOGY
- High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
- (2009) K. Sarakinos et al. SURFACE & COATINGS TECHNOLOGY
- Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology
- (2009) Donghai Yu et al. THIN SOLID FILMS
- Machinability of titanium alloys (Ti6Al4V and Ti555.3)
- (2008) P.-J. Arrazola et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
- Spatial distribution of average charge state and deposition rate in high power impulse magnetron sputtering of copper
- (2008) David Horwat et al. JOURNAL OF PHYSICS D-APPLIED PHYSICS
- Effect of the microstructure on the cutting performance of superhard (Ti,Si,Al)N nanocomposite films
- (2008) C. Fernandes et al. VACUUM
- Corrosion behavior of TiN, TiAlN, TiAlSiN thin films deposited on tool steel in the 3.5 wt.% NaCl solution
- (2007) Yun Ha Yoo et al. THIN SOLID FILMS
- The physical reason for the apparently low deposition rate during high-power pulsed magnetron sputtering
- (2007) Jens Emmerlich et al. VACUUM
Publish scientific posters with Peeref
Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.
Learn MoreCreate your own webinar
Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.
Create Now