4.6 Article

On the strong coupling of polarization and charge trapping in HfO2/Si-based ferroelectric field-effect transistors: overview of device operation and reliability

Journal

Publisher

SPRINGER HEIDELBERG
DOI: 10.1007/s00339-022-06212-6

Keywords

Ferroelectric field-effect transistor; FeFET; Hafnium oxide; Polarization switching; Charge trapping; Interfacial layer

Funding

  1. JST CREST, Japan [JPMJCR20C3]
  2. JSPS KAKENHI, Japan [21H01359]

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This tutorial reviews the nonideal physical phenomenon of polarization-induced electron trapping in ferroelectric field-effect transistors (FeFETs) and its impact on device operation and performance. It also discusses several approaches to mitigate anomalous electron trapping.
Ferroelectric field-effect transistors (FeFETs) have become an attractive technology for memory and emerging applications on a silicon electronic platform after the discovery of the ferroelectric phase in silicon-friendly hafnium oxide insulators. In this tutorial, we review one nonideal physical phenomenon that determines the device operation of practical FeFETs based on ferroelectric hafnium oxide (FE-HfO2) insulators and silicon channels: polarization-induced electron trapping. The ferroelectric polarization in FE-HfO2 induces an enormous amount of trapped electron density of an order of 10(14) cm(-2) near the interface between the FE-HfO2 and interfacial layer, which in turn screens the electric flux from polarization. We examine how electron trapping affects the device operation particularly the polarization switching mechanism, retention characteristics, endurance characteristics, and read-after-write delay. The asymmetric behavior of electron and hole trapping in FeFETs and its impact on the device operation are also discussed. We review several approaches based on different operations, device structure modification, and material engineering to mitigate anomalous electron trapping and improve the device characteristics of FeFETs.

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