Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering
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Title
Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering
Authors
Keywords
High entropy alloy nitride coatings, RF magnetron sputtering, Bias voltage, Microstructure, Hardness, Tribological performance
Journal
VACUUM
Volume 195, Issue -, Pages 110710
Publisher
Elsevier BV
Online
2021-10-28
DOI
10.1016/j.vacuum.2021.110710
References
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