Plasma etching behavior of Y 2 O 3 ceramics: Comparative study with Al 2 O 3

Published 2016 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Plasma etching behavior of Y 2 O 3 ceramics: Comparative study with Al 2 O 3
Authors
Keywords
Fluorocarbon plasma, Etching, Yttrium oxide, Thermal spray, Spark plasma sintering
Journal
APPLIED SURFACE SCIENCE
Volume 366, Issue -, Pages 304-309
Publisher
Elsevier BV
Online
2016-01-14
DOI
10.1016/j.apsusc.2016.01.092

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.