Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings

Published 2007 View Full Article

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Title
Influence of substrate bias, deposition temperature and post-deposition annealing on the structure and properties of multi-principal-component (AlCrMoSiTi)N coatings
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 202, Issue 14, Pages 3360-3366
Publisher
Elsevier BV
Online
2007-12-28
DOI
10.1016/j.surfcoat.2007.12.014

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