Effects of deposition parameters on the structure and mechanical properties of high-entropy alloy nitride films

Title
Effects of deposition parameters on the structure and mechanical properties of high-entropy alloy nitride films
Authors
Keywords
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Journal
CURRENT APPLIED PHYSICS
Volume 18, Issue 5, Pages 512-518
Publisher
Elsevier BV
Online
2018-02-24
DOI
10.1016/j.cap.2018.02.015

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