Microstructure, hardness, and wear resistance of sputtering TaN coating by controlling RF input power

Published 2016 View Full Article

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Title
Microstructure, hardness, and wear resistance of sputtering TaN coating by controlling RF input power
Authors
Keywords
TaN, Input power, Wear, Multilayer, Protective layer
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 303, Issue -, Pages 32-40
Publisher
Elsevier BV
Online
2016-03-12
DOI
10.1016/j.surfcoat.2016.03.034

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