Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure
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Title
Electrical breakdown strength enhancement in aluminum scandium nitride through a compositionally modulated periodic multilayer structure
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 130, Issue 14, Pages 144101
Publisher
AIP Publishing
Online
2021-10-11
DOI
10.1063/5.0064041
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