On the thickness scaling of ferroelectricity in Al0.78Sc0.22N films

Title
On the thickness scaling of ferroelectricity in Al0.78Sc0.22N films
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 60, Issue SB, Pages SBBA05
Publisher
IOP Publishing
Online
2021-03-17
DOI
10.35848/1347-4065/abef15

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