Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals

Title
Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals
Authors
Keywords
Phase transition, Plastic deformation mechanism, Subsurface damage, Self-rotating grinding, Scratch, Gallium nitride single crystal
Journal
Publisher
Elsevier BV
Online
2021-11-13
DOI
10.1016/j.ijmachtools.2021.103827

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