Nanogrinding induced surface and deformation mechanism of single crystal β-Ga 2 O 3

Title
Nanogrinding induced surface and deformation mechanism of single crystal β-Ga 2 O 3
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 79, Issue -, Pages 165-170
Publisher
Elsevier BV
Online
2018-02-16
DOI
10.1016/j.mssp.2017.12.017

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