Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals

标题
Phase transition and plastic deformation mechanisms induced by self-rotating grinding of GaN single crystals
作者
关键词
Phase transition, Plastic deformation mechanism, Subsurface damage, Self-rotating grinding, Scratch, Gallium nitride single crystal
出版物
出版商
Elsevier BV
发表日期
2021-11-13
DOI
10.1016/j.ijmachtools.2021.103827

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