Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
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Title
Study on the processing outcomes of the atomic force microscopy tip-based nanoscratching on GaAs
Authors
Keywords
Atomic force microscopy, Naonscratching, Single crystal gallium arsenide, Subsurface damage
Journal
Journal of Manufacturing Processes
Volume 70, Issue -, Pages 238-247
Publisher
Elsevier BV
Online
2021-09-03
DOI
10.1016/j.jmapro.2021.08.033
References
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Related references
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