Effects of initial temperature on the damage of GaN during nanogrinding

Title
Effects of initial temperature on the damage of GaN during nanogrinding
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 556, Issue -, Pages 149771
Publisher
Elsevier BV
Online
2021-04-13
DOI
10.1016/j.apsusc.2021.149771

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