Effect of Nitrogen and Aluminum Doping on 3C-SiC Heteroepitaxial Layers Grown on 4° Off-Axis Si (100)

Title
Effect of Nitrogen and Aluminum Doping on 3C-SiC Heteroepitaxial Layers Grown on 4° Off-Axis Si (100)
Authors
Keywords
-
Journal
Materials
Volume 14, Issue 16, Pages 4400
Publisher
MDPI AG
Online
2021-08-06
DOI
10.3390/ma14164400

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