From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction

Title
From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 78, Issue -, Pages 57-68
Publisher
Elsevier BV
Online
2018-03-01
DOI
10.1016/j.mssp.2017.12.012

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