Structural and electrical properties of V2O3 thin films on c-plane Al2O3 fabricated by reactive-HiPIMS and dcMS techniques
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Title
Structural and electrical properties of V2O3 thin films on c-plane Al2O3 fabricated by reactive-HiPIMS and dcMS techniques
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 54, Issue 42, Pages 425302
Publisher
IOP Publishing
Online
2021-07-15
DOI
10.1088/1361-6463/ac1463
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