Hysteresis-free reactive high power impulse magnetron sputtering

Published 2007 View Full Article

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Title
Hysteresis-free reactive high power impulse magnetron sputtering
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 516, Issue 18, Pages 6398-6401
Publisher
Elsevier BV
Online
2007-09-04
DOI
10.1016/j.tsf.2007.08.123

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