Studies of hysteresis effect in reactive HiPIMS deposition of oxides

Title
Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 205, Issue -, Pages S303-S306
Publisher
Elsevier BV
Online
2011-01-18
DOI
10.1016/j.surfcoat.2011.01.019

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