Influence of Si doping on the microstructure and hardness of an AlTiSiN coating deposited by low pressure chemical vapor deposition

Title
Influence of Si doping on the microstructure and hardness of an AlTiSiN coating deposited by low pressure chemical vapor deposition
Authors
Keywords
AlTiSiN coating, Chemical vapor deposition, Si doping, Microstructure, Hardness
Journal
CERAMICS INTERNATIONAL
Volume 47, Issue 18, Pages 25593-25601
Publisher
Elsevier BV
Online
2021-06-01
DOI
10.1016/j.ceramint.2021.05.285

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