Influence of Si doping on the microstructure and hardness of an AlTiSiN coating deposited by low pressure chemical vapor deposition
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Title
Influence of Si doping on the microstructure and hardness of an AlTiSiN coating deposited by low pressure chemical vapor deposition
Authors
Keywords
AlTiSiN coating, Chemical vapor deposition, Si doping, Microstructure, Hardness
Journal
CERAMICS INTERNATIONAL
Volume 47, Issue 18, Pages 25593-25601
Publisher
Elsevier BV
Online
2021-06-01
DOI
10.1016/j.ceramint.2021.05.285
References
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Note: Only part of the references are listed.- The effect of microstructure on corrosion behavior of a novel AlCrTiSiN ceramic coating
- (2020) Wanglin Chen et al. CERAMICS INTERNATIONAL
- High-temperature thermal stability and oxidation resistance of Cr and Ta co-alloyed Ti − Al − N coatings deposited by cathodic arc evaporation
- (2020) Bin Peng et al. CORROSION SCIENCE
- Influence of probe geometry in micro-scale impact testing of nano-multilayered TiAlCrN/NbN coatings deposited on WC-Co
- (2020) B.D. Beake et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Thermal stability of nanolamellar fcc-Ti1-xAlxN grown by chemical vapor deposition
- (2019) Michael Tkadletz et al. ACTA MATERIALIA
- Microstructure and mechanical properties of Ti-Al-Cr-N films: Effect of current of additional anode
- (2019) Ying Kong et al. APPLIED SURFACE SCIENCE
- Influence of hysteresis effect on properties of reactively sputtered TiAlSiN films
- (2018) Fangyuan Gao et al. APPLIED SURFACE SCIENCE
- Influence of the Al content on mechanical properties of CVD aluminum titanium nitride coatings
- (2018) Takuya Ishigaki et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering
- (2018) Y. X. Ou et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Influence of Y-addition and multilayer modulation on microstructure, oxidation resistance and corrosion behavior of Al 0.67 Ti 0.33 N coatings
- (2018) Jinjun Mo et al. SURFACE & COATINGS TECHNOLOGY
- Microstructure, mechanical properties, and cutting performance of TiAlSiN multilayer coatings prepared by HiPIMS
- (2018) Guodong Li et al. SURFACE & COATINGS TECHNOLOGY
- Effect of modulation structure on the microstructural and mechanical properties of TiAlSiN/CrN thin films prepared by high power impulse magnetron sputtering
- (2018) Hui Liu et al. SURFACE & COATINGS TECHNOLOGY
- Deposition and characterization of (Ti, Al)N coatings deposited by thermal LPCVD in an industrial reactor
- (2018) Florent Uny et al. SURFACE & COATINGS TECHNOLOGY
- Flexible hard TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering with controllable peak power
- (2018) H. Chen et al. THIN SOLID FILMS
- Modeling of metastable phase formation for sputtered Ti1-xAlxN thin films
- (2018) Sida Liu et al. ACTA MATERIALIA
- Nanostructured coatings for tooling applications
- (2017) Arno Köpf et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Influence of substrate bias on microstructural evolution and mechanical properties of TiAlSiN thin films deposited by pulsed-DC magnetron sputtering
- (2017) Fuyang Cao et al. THIN SOLID FILMS
- Crystallite size-dependent metastable phase formation of TiAlN coatings
- (2017) Marcus Hans et al. Scientific Reports
- Effect of Ti content on the microstructure and mechanical properties of TiAlSiN nanocomposite coatings
- (2016) Quansheng Ma et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Deposition and Analysis of Al-Rich c-AlxTi1−xN Coating with Preferred Orientation
- (2016) Anongsack Paseuth et al. JOURNAL OF THE AMERICAN CERAMIC SOCIETY
- Al-rich cubic Al0.8Ti0.2N coating with self-organized nano-lamellar microstructure: Thermal and mechanical properties
- (2016) J. Todt et al. SURFACE & COATINGS TECHNOLOGY
- Effect of 10% Si addition on cathodic arc evaporated TiAlSiN coatings
- (2016) Li-hui ZHU et al. TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
- Structure and phase formation in the Ti–Al–Si–N system during the growth of nanostructured arc PVD coatings
- (2015) I. V. Blinkov et al. INORGANIC MATERIALS
- Vacancy-dependent stability of cubic and wurtzite Ti1−xAlxN
- (2015) H. Euchner et al. SURFACE & COATINGS TECHNOLOGY
- Preparation and characterization of CrAlN/TiAlSiN nano-multilayers by cathodic vacuum arc
- (2015) Wanglin Chen et al. SURFACE & COATINGS TECHNOLOGY
- Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
- (2015) Z.L. Wu et al. THIN SOLID FILMS
- Correlation between microstructure evolution and high temperature properties of TiAlSiN hard coatings with different Si and Al content
- (2014) Tian Chen et al. APPLIED SURFACE SCIENCE
- Tribological performance of TiAlSiN and TiAlCrN/TiAlN coating blades
- (2014) JieSong Tu et al. Science China-Technological Sciences
- Superior oxidation resistance, mechanical properties and residual stresses of an Al-rich nanolamellar Ti 0.05 Al 0.95 N coating prepared by CVD
- (2014) J. Todt et al. SURFACE & COATINGS TECHNOLOGY
- Deposition and characterization of TiAlSiN coatings prepared by hybrid PVD coating system
- (2014) Jinfeng Wu et al. SURFACE AND INTERFACE ANALYSIS
- Self-organized periodic soft-hard nanolamellae in polycrystalline TiAlN thin films
- (2013) J. Keckes et al. THIN SOLID FILMS
- Oxidation resistance and hardness of TiAlSiN/CrAlYN multilayer films deposited by the arc ion plating method
- (2012) T. Mori et al. SURFACE & COATINGS TECHNOLOGY
- High temperature oxidation behavior of Ti0.5Al0.5N coating and Ti0.5Al0.4Si0.1N coating
- (2012) Lihui Zhu et al. VACUUM
- Effect of Cu addition on properties of Ti-Al-Si-N nanocomposite films deposited by cathodic vacuum arc ion plating
- (2011) J. Shi et al. SURFACE & COATINGS TECHNOLOGY
- Effect of Hf on structure and age hardening of Ti–Al-N thin films
- (2011) R. Rachbauer et al. SURFACE & COATINGS TECHNOLOGY
- Influence of Zr on structure, mechanical and thermal properties of Ti–Al–N
- (2011) Li Chen et al. THIN SOLID FILMS
- Deposition and characterization of TiAlSiN nanocomposite coatings prepared by reactive pulsed direct current unbalanced magnetron sputtering
- (2010) Harish C. Barshilia et al. APPLIED SURFACE SCIENCE
- Effect of Si addition on microstructure and mechanical properties of Ti–Al–N coating
- (2010) She Q. Wang et al. INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
- Structure and mechanical properties of TiAlSiN/Si3N4 multilayer coatings
- (2010) K. Zhang et al. SURFACE & COATINGS TECHNOLOGY
- High temperature oxidation behavior of multicomponent TiAlSiN coatings
- (2010) Yin-Yu Chang et al. THIN SOLID FILMS
- Influence of Yttrium on the Thermal Stability of Ti-Al-N Thin Films
- (2010) Martin Moser et al. Materials
- Pressure enhancement of the isostructural cubic decomposition in Ti1−xAlxN
- (2009) B. Alling et al. APPLIED PHYSICS LETTERS
- Thermal Stability of TiAlN and Nanocomposite TiAlSiN Thin Films
- (2009) Sheng-Min Yang et al. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- Pressure-dependent stability of cubic and wurtzite phases within the TiN–AlN and CrN–AlN systems
- (2009) David Holec et al. SCRIPTA MATERIALIA
- Improved oxidation resistance of TiAlN coatings by doping with Si or B
- (2009) M. Pfeiler et al. SURFACE & COATINGS TECHNOLOGY
- Synthesis and oxidation resistance of TiAlSiN and multilayer TiAlSiN/CrAlN coating
- (2009) N. Fukumoto et al. SURFACE & COATINGS TECHNOLOGY
- Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology
- (2009) Donghai Yu et al. THIN SOLID FILMS
- Advantages of nanocomposite coatings deposited by high power pulse magnetron sputtering technology
- (2008) K. Bobzin et al. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
- Industrial applications of superhard nanocomposite coatings
- (2008) Stan Veprek et al. SURFACE & COATINGS TECHNOLOGY
- Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1−xSixN thin films
- (2008) A. Flink et al. THIN SOLID FILMS
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