Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1−xSixN thin films

Published 2008 View Full Article

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Title
Structure and thermal stability of arc evaporated (Ti0.33Al0.67)1−xSixN thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 517, Issue 2, Pages 714-721
Publisher
Elsevier BV
Online
2008-08-25
DOI
10.1016/j.tsf.2008.08.126

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