Phase transformation and dielectric properties of Y doped HfO2 thin films
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Title
Phase transformation and dielectric properties of Y doped HfO2 thin films
Authors
Keywords
Y doped HfO, 2, Thin films, Phase transformation, Dielectric properties
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 861, Issue -, Pages 158241
Publisher
Elsevier BV
Online
2021-01-09
DOI
10.1016/j.jallcom.2020.158241
References
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- (2008) Peng Zhang et al. Journal of Physical Chemistry C
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