标题
Phase transformation and dielectric properties of Y doped HfO2 thin films
作者
关键词
Y doped HfO, 2, Thin films, Phase transformation, Dielectric properties
出版物
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 861, Issue -, Pages 158241
出版商
Elsevier BV
发表日期
2021-01-09
DOI
10.1016/j.jallcom.2020.158241
参考文献
相关参考文献
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