Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

Published 2009 View Full Article

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Title
Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1818-1821
Publisher
Elsevier BV
Online
2009-03-18
DOI
10.1016/j.mee.2009.03.076

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