Structure and electrical properties of pure and yttrium-doped HfO 2 films by chemical solution deposition through layer by layer crystallization process
Structure and electrical properties of pure and yttrium-doped HfO 2 films by chemical solution deposition through layer by layer crystallization process
Authors
Keywords
Pure and yttrium-doped HfO2, Layer by layer crystallization process, Thin films, Electrical properties
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