Highly uniform microfluidic electroless interconnections for chip stacking applications

Title
Highly uniform microfluidic electroless interconnections for chip stacking applications
Authors
Keywords
Electroless plating, Chip stacking, Pressure-free bonding, Vertical interconnection, Low-temperature bonding
Journal
ELECTROCHIMICA ACTA
Volume 376, Issue -, Pages 138032
Publisher
Elsevier BV
Online
2021-02-24
DOI
10.1016/j.electacta.2021.138032

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