Structural properties and surface oxidation states of sputter‐deposited TiO 2− x thin films
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Title
Structural properties and surface oxidation states of sputter‐deposited TiO
2−
x
thin films
Authors
Keywords
-
Journal
SURFACE AND INTERFACE ANALYSIS
Volume -, Issue -, Pages -
Publisher
Wiley
Online
2021-02-18
DOI
10.1002/sia.6938
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