Effects of substrate temperature and precursor amount on optical properties and microstructure of CVD deposited amorphous TiO2 thin films

Published 2019 View Full Article

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Title
Effects of substrate temperature and precursor amount on optical properties and microstructure of CVD deposited amorphous TiO2 thin films
Authors
Keywords
TiO, 2, thin film, CVD, Optical properties, Amorphous structure, Substrate temperature
Journal
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2019-01-15
DOI
10.1016/j.jpcs.2019.01.012

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