Improvement of UV photodetector properties of reactively sputtered TiO2−x films through vacuum annealing
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Title
Improvement of UV photodetector properties of reactively sputtered TiO2−x films through vacuum annealing
Authors
Keywords
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Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 30, Issue 23, Pages 20687-20695
Publisher
Springer Science and Business Media LLC
Online
2019-11-09
DOI
10.1007/s10854-019-02434-2
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