Experimental and computational investigation of low temperature Cu Sn solid-state-diffusion bonding for 3D integration
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Title
Experimental and computational investigation of low temperature Cu Sn solid-state-diffusion bonding for 3D integration
Authors
Keywords
3D integration, Low temperature Cu, Sn bonding, Thickness optimization, Growth kinetics, Size effect
Journal
MICROELECTRONIC ENGINEERING
Volume 236, Issue -, Pages 111479
Publisher
Elsevier BV
Online
2020-11-10
DOI
10.1016/j.mee.2020.111479
References
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