Robust adaptive motion tracking of piezoelectric actuated stages using online neural-network-based sliding mode control
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Title
Robust adaptive motion tracking of piezoelectric actuated stages using online neural-network-based sliding mode control
Authors
Keywords
Piezo-actuated stage, Precision motion tracking, Neural networks, Robust adaptive control, Sliding mode control, Disturbance rejection
Journal
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
Volume 150, Issue -, Pages 107235
Publisher
Elsevier BV
Online
2020-09-15
DOI
10.1016/j.ymssp.2020.107235
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