Effect of a protective coating on the surface integrity of a microchannel produced by microultrasonic machining
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Title
Effect of a protective coating on the surface integrity of a microchannel produced by microultrasonic machining
Authors
Keywords
Ultrasonic machining, Silicon microchannel, Surface integrity, Coating
Journal
Journal of Manufacturing Processes
Volume 61, Issue -, Pages 280-295
Publisher
Elsevier BV
Online
2020-12-05
DOI
10.1016/j.jmapro.2020.11.027
References
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