Micro-ultrasonic drilling of monocrystalline silicon: An experimental investigation on machined surface topography and optimization using User's preference rating based TOPSIS

Published 2019 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Micro-ultrasonic drilling of monocrystalline silicon: An experimental investigation on machined surface topography and optimization using User's preference rating based TOPSIS
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 102, Issue -, Pages 104584
Publisher
Elsevier BV
Online
2019-06-28
DOI
10.1016/j.mssp.2019.104584

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.