Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool

Micro-ultrasonic drilling of monocrystalline silicon: An experimental investigation on machined surface topography and optimization using User's preference rating based TOPSIS

(2019) Sandeep Kumar et al.   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow

(2019) Jun Zhao et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Investigation of the optimal parameters for the surface finish of K9 optical glass using a soft abrasive rotary flow polishing process

(2019) Jun Zhao et al.   Journal of Manufacturing Processes

Effects of abrasive material and particle shape on machining performance in micro ultrasonic machining

(2018) Jingsi Wang et al.   PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Micro-EDM and micro-USM combined milling of ZrB2-SiC-graphite composite for 3D micro-cavities

(2018) Huichao Li et al.   INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

Machinability study of Zr-Cu-Ti metallic glass by micro hole drilling using micro-USM

(2017) Sandeep Kuriakose et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

On the mechanism and mechanics of material removal in ultrasonic machining

(2015) Sanjay Agarwal   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Tool wear studies in fabrication of microchannels in ultrasonic micromachining

(2015) Manjot S. Cheema et al.   ULTRASONICS

Effect of process parameters on MRR, TWR and surface topography in ultrasonic machining of alumina–zirconia ceramic composite

(2014) Shrikrushna B. Bhosale et al.   CERAMICS INTERNATIONAL

High resolution micro ultrasonic machining for trimming 3D microstructures

(2014) Anupam Viswanath et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

The Development of Micromachined Gyroscope Structure and Circuitry Technology

(2014) Dunzhu Xia et al.   SENSORS

A study on the optimal fabrication method for micro-scale gyroscopes using a hybrid process consisting of electric discharge machining, chemical etching or micro-mechanical milling

(2013) Peter Fonda et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Hemispherical wineglass resonators fabricated from the microcrystalline diamond

(2013) Amir Heidari et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Prediction of tool wear in micro USM

(2012) Zuyuan Yu et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Predictive modeling of material removal modes in micro ultrasonic machining

(2012) H. Zarepour et al.   INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

Enhancement of surface quality in ultrasonic machining of glass using a sacrificing coating

(2012) Dae Kyun Baek et al.   JOURNAL OF MATERIALS PROCESSING TECHNOLOGY