Nanoimprint lithography with a focused laser beam for the fabrication of nanopatterned microchannel molds

3D molding of hierarchical micro- and nanostructures

(2011) Bahador Farshchian et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8

(2011) Hamza A Rouabah et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Fabrication of high aspect ratio nanostructures on 3D surfaces

(2011) T. Senn et al.   MICROELECTRONIC ENGINEERING

3D Bi-chiral Photonic Crystals: Three-Dimensional Bi-Chiral Photonic Crystals (Adv. Mater. 46/2009)

(2010) Michael Thiel et al.   ADVANCED MATERIALS

A Decade of Step and Flash Imprint Lithography

(2009) C. Grant Wilson   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Two-photon stereolithography for realizing ultraprecise three-dimensional nano/microdevices

(2008) S.-H. Park et al.   Laser & Photonics Reviews

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

(2008) Shen-Qi Xie et al.   MICROELECTRONIC ENGINEERING

High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures

(2008) Ren Yang et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS