Simple multi-level microchannel fabrication by pseudo-grayscale backside diffused light lithography

Title
Simple multi-level microchannel fabrication by pseudo-grayscale backside diffused light lithography
Authors
Keywords
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Journal
RSC Advances
Volume 3, Issue 42, Pages 19467
Publisher
Royal Society of Chemistry (RSC)
Online
2013-08-08
DOI
10.1039/c3ra43834a

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