Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

Revisitation of Extraordinary Young’s Interference: from Catenary Optical Fields to Spin–Orbit Interaction in Metasurfaces

(2018) Mingbo Pu et al.   ACS Photonics

Tunable laser interference lithography preparation of plasmonic nanoparticle arrays tailored for SERS

(2018) Nestor Gisbert Quilis et al.   Nanoscale

Dry-etching-assisted femtosecond laser machining

(2017) Xue-Qing Liu et al.   Laser & Photonics Reviews

Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam

(2017) Liang Yang et al.   OPTICS LETTERS

Wafer-scale fabrication of high-density nanoslit arrays for surface-enhanced Raman spectroscopy

(2016) Mingliang Jin et al.   NANOTECHNOLOGY

Large-Area Low-Cost Plasmonic Perfect Absorber Chemical Sensor Fabricated by Laser Interference Lithography

(2016) Shahin Bagheri et al.   ACS Sensors

A simplified method for generating periodic nanostructures by interference lithography without the use of an anti-reflection coating

(2015) Omree Kapon et al.   APPLIED PHYSICS LETTERS

Making lithography work for the 7-nm node and beyond in overlay accuracy, resolution, defect, and cost

(2015) Burn J. Lin   MICROELECTRONIC ENGINEERING

Two-Step Photonic Reduction of Controlled Periodic Silver Nanostructures for Surface-Enhanced Raman Spectroscopy

(2015) Shi Bai et al.   Plasmonics

Principles of electromagnetic waves in metasurfaces

(2015) XianGang Luo   Science China-Physics Mechanics & Astronomy

Parallel laser writing system with scanning Dammann lithography

(2014) Feng Zhu Feng Zhu et al.   Chinese Optics Letters

Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography

(2014) Jia Xu et al.   JOURNAL OF APPLIED PHYSICS

Periodic antireflection surface structure fabricated on silicon by four-beam laser interference lithography

(2014) Z. Zhang et al.   JOURNAL OF LASER APPLICATIONS

Rapid Cutting and Drilling of Transparent Materials via Femtosecond Laser Filamentation

(2014) Simas Butkus   Journal of Laser Micro Nanoengineering

Ultraviolet pulsed laser interference lithography and application of periodic structured Ag-nanoparticle films for surface-enhanced Raman spectroscopy

(2014) Shi Bai et al.   JOURNAL OF NANOPARTICLE RESEARCH

Nanopatterning by Laser Interference Lithography: Applications to Optical Devices

(2014) Jung-Hun Seo et al.   JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY

Projection two-photon polymerization using a spatial light modulator

(2014) Liang Yang et al.   OPTICS COMMUNICATIONS

Rapid fabrication of a large-area close-packed quasi-periodic microlens array on BK7 glass

(2014) Feng Chen et al.   OPTICS LETTERS

Design and fabrication of broadband ultralow reflectivity black Si surfaces by laser micro/nanoprocessing

(2014) Jing Yang et al.   Light-Science & Applications

Creation of diffraction-limited non-Airy multifocal arrays using a spatially shifted vortex beam

(2013) Han Lin et al.   APPLIED PHYSICS LETTERS

Direct modification of silicon surface by nanosecond laser interference lithography

(2013) Dapeng Wang et al.   APPLIED SURFACE SCIENCE

An optimal substrate design for SERS: dual-scale diamond-shaped gold nano-structures fabricated via interference lithography

(2013) Hyo-Jin Ahn et al.   Nanoscale

Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask

(2013) J. Lutkenhaus et al.   OPTICS EXPRESS

Contents: (Adv. Mater. 2/2012)

(2012)   ADVANCED MATERIALS

Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors

(2012) Alexander Arriola et al.   Optical Materials Express

Two-beam-laser interference mediated reduction, patterning and nanostructuring of graphene oxide for the production of a flexible humidity sensing device

(2011) Li Guo et al.   CARBON

A SERS-active microfluidic device with tunable surface plasmon resonances

(2011) Bin-Bin Xu et al.   ELECTROPHORESIS

Improved efficiency in GaAs solar cells by 1D and 2D nanopatterns fabricated by laser interference lithography

(2011) Kyoung Seok Cho et al.   OPTICS COMMUNICATIONS

Broadband multi-layer terahertz metamaterials fabrication and characterization on flexible substrates

(2011) N. R. Han et al.   OPTICS EXPRESS

Time dynamics of burst-train filamentation assisted femtosecond laser machining in glasses

(2011) Dagmar Esser et al.   OPTICS EXPRESS

Maskless laser tailoring of conical pillar arrays for antireflective biomimetic surfaces

(2011) Lei Wang et al.   OPTICS LETTERS

Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabrication

(2011) Han Lin et al.   OPTICS LETTERS

Nanolithography in microelectronics: A review

(2011) R. P. Seisyan   TECHNICAL PHYSICS

Tunable resonance enhancement of multi-layer terahertz metamaterials fabricated by parallel laser micro-lens array lithography on flexible substrates

(2011) Z. C. Chen et al.   Optical Materials Express

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

(2011) Guy M. Burrow et al.   Micromachines

Heteroepitaxial Patterned Growth of Vertically Aligned and Periodically Distributed ZnO Nanowires on GaN Using Laser Interference Ablation

(2010) Dajun Yuan et al.   ADVANCED FUNCTIONAL MATERIALS

Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

(2010) C. H. Liu et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

Nano-photomask fabrication using focused ion beam direct writing

(2010) F.Z. Fang et al.   CIRP ANNALS-MANUFACTURING TECHNOLOGY

Parallel near-field optical micro/nanopatterning on curved surfaces by transported micro-particle lens arrays

(2010) Ashfaq Khan et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Fabrication of metallic nanowires and nanoribbons using laser interference lithography and shadow lithography

(2010) Joong-Mok Park et al.   NANOTECHNOLOGY

Interference lithographically defined and catalytically etched, large-area silicon nanocones from nanowires

(2010) M K Dawood et al.   NANOTECHNOLOGY

Hybrid metamaterial design and fabrication for terahertz resonance response enhancement

(2010) C. S. Lim et al.   OPTICS EXPRESS

Bioinspired Parabola Subwavelength Structures for Improved Broadband Antireflection

(2010) Young Min Song et al.   Small

Theoretical and experimental investigation of the near field under ordered silica spheres on substrate

(2009) S. M. Huang et al.   APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

405 nm Laser Thermal Lithography of 40 nm Pattern Using Super Resolution Organic Resist Material

(2009) Yoshihisa Usami et al.   Applied Physics Express

Large-area laser nano-texturing with user-defined patterns

(2009) L Li et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence

(2009) P Zuppella et al.   NANOTECHNOLOGY

Array-based optical nanolithography using optically trapped microlenses

(2009) Euan McLeod et al.   OPTICS EXPRESS

Closely packed and aspect-ratio-controlled antireflection subwavelength gratings on GaAs using a lenslike shape transfer

(2009) Young Min Song et al.   OPTICS LETTERS

Tunable reflection minima of nanostructured antireflective surfaces

(2008) S. A. Boden et al.   APPLIED PHYSICS LETTERS

Nanoimprint lithography: An old story in modern times? A review

(2008) Helmut Schift   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Sub-10 nm Nanoimprint Lithography by Wafer Bowing

(2008) Wei Wu et al.   NANO LETTERS

Subwavelength direct-write nanopatterning using optically trapped microspheres

(2008) Euan Mcleod et al.   Nature Nanotechnology

Bimetallic structure fabricated by laser interference lithography for tuning surface plasmon resonance

(2008) C. H. Liu et al.   OPTICS EXPRESS

Fabrication of photonic crystals with functional defects by one-step holographic lithography

(2008) Juntao Li et al.   OPTICS EXPRESS

Ag dots array fabricated using laser interference technique for biosensing

(2008) Haiying Li et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fabrication of nanostructures with laser interference lithography

(2006) Q. Xie et al.   JOURNAL OF ALLOYS AND COMPOUNDS