Journal
MICROMACHINES
Volume 2, Issue 2, Pages 221-257Publisher
MDPI
DOI: 10.3390/mi2020221
Keywords
multi-beam interference; interference lithography; nano-electronics; photonic crystals; metamaterials; subwavelength structures; optical trapping; biomedical structures
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Funding
- National Science Foundation [ECCS 0925119]
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [0925119] Funding Source: National Science Foundation
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Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.
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