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Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

Journal

MICROMACHINES
Volume 2, Issue 2, Pages 221-257

Publisher

MDPI
DOI: 10.3390/mi2020221

Keywords

multi-beam interference; interference lithography; nano-electronics; photonic crystals; metamaterials; subwavelength structures; optical trapping; biomedical structures

Funding

  1. National Science Foundation [ECCS 0925119]
  2. Div Of Electrical, Commun & Cyber Sys
  3. Directorate For Engineering [0925119] Funding Source: National Science Foundation

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Research in recent years has greatly advanced the understanding and capabilities of multi-beam interference (MBI). With this technology it is now possible to generate a wide range of one-, two-, and three-dimensional periodic optical-intensity distributions at the micro-and nano-scale over a large length/area/volume. These patterns may be used directly or recorded in photo-sensitive materials using multi-beam interference lithography (MBIL) to accomplish subwavelength patterning. Advances in MBI and MBIL and a very wide range of applications areas including nano-electronics, photonic crystals, metamaterials, subwavelength structures, optical trapping, and biomedical structures are reviewed and put into a unified perspective.

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