Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask

Title
Digitally tunable holographic lithography using a spatial light modulator as a programmable phase mask
Authors
Keywords
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Journal
OPTICS EXPRESS
Volume 21, Issue 22, Pages 26227
Publisher
The Optical Society
Online
2013-10-26
DOI
10.1364/oe.21.026227

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