Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches

Title
Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
Authors
Keywords
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Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 106, Issue 9-10, Pages 3869-3880
Publisher
Springer Science and Business Media LLC
Online
2020-01-09
DOI
10.1007/s00170-019-04886-6

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