Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
出版年份 2020 全文链接
标题
Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
作者
关键词
-
出版物
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 106, Issue 9-10, Pages 3869-3880
出版商
Springer Science and Business Media LLC
发表日期
2020-01-09
DOI
10.1007/s00170-019-04886-6
参考文献
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