Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Published 2013 View Full Article

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Title
Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 289, Issue -, Pages 529-532
Publisher
Elsevier BV
Online
2013-11-21
DOI
10.1016/j.apsusc.2013.11.030

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