Subsurface damages beneath fracture pits of reaction-bonded silicon carbide after ultra-precision grinding

Published 2018 View Full Article

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Title
Subsurface damages beneath fracture pits of reaction-bonded silicon carbide after ultra-precision grinding
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 448, Issue -, Pages 341-350
Publisher
Elsevier BV
Online
2018-04-14
DOI
10.1016/j.apsusc.2018.04.038

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