Model Friction Studies of Chemical Mechanical Planarization Using a Pin-on-Disk Tribometer
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Title
Model Friction Studies of Chemical Mechanical Planarization Using a Pin-on-Disk Tribometer
Authors
Keywords
CMP, Tribology, Water, CMP pad, CMP slurry
Journal
TRIBOLOGY LETTERS
Volume 67, Issue 3, Pages -
Publisher
Springer Science and Business Media LLC
Online
2019-06-24
DOI
10.1007/s11249-019-1188-1
References
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